Fluorine-based inductively coupled plasma etching of ZnO film
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چکیده
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Inductively Coupled Plasma Etching of Bulk Titanium for MEMS Applications
Titanium is a promising new material system for the bulk micromachining of microelectromechanical MEMS devices. Titaniumbased MEMS have the potential to be used for a number of applications, including those which require high fracture toughness or biocompatibility. The bulk titanium etch rate, TiO2 mask etch rate, and surface roughness in an inductively coupled plasma ICP as a function of vario...
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ژورنال
عنوان ژورنال: Journal of the Korean Crystal Growth and Crystal Technology
سال: 2011
ISSN: 1225-1429
DOI: 10.6111/jkcgct.2011.21.6.230